短流程工艺能力 · Short Loop Process
T&R Process Capability
晶圆级测试 CP Test
分选 T&R
·具备切割前及切割后测试能力
·Ability to test before and after
·At present, it mainly adopts two kinds of mechanical cutting and laser hidden cutting
·Support wafer materials::Glass/Si/EMC/LT/LN/SiC/GaN etc.
·The laser hides glass and silicon wafers facing narrow cutting paths
·Workable wafer size:4寸/6寸/8寸/12 inch
·Control: chip size/edge breakage after cutting
切割 Dicing
减薄 Backside Grinding
史密斯(Smith)圆图
测试设备组合
薄膜探卡示意图